The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates

Simion Jitian

doi:doi:10.11648/j.ajop.20150304.12

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The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates

Simion Jitian

Published in American Journal of Optics and Photonics (Volume 3, Issue 4)

Received: 17 July 2015 Accepted: 29 July 2015 Published: 11 August 2015

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Abstract

The ellipsometrical analysis of the external specular reflection of light on nonabsorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical nonabsorbing superficial films the curves =f(d_f) and =f(d_f) are periodical, while the curves =f() are closed. The paper presents observations on the dependence of the ellipsometric parameters  and  on d_f. The analysis of the periodicity of these curves allows us to correctly determine the film thickness for thicknesses greater than d_min. The value of d_min depends on the refractive index n_f of the surface film, the incidence angle φ0 and the wavelength λ of the incident radiation. The dependence of d_min on n_f, φ0 and λ is analyzed. From the curve shape we can draw conclusions with respect to the domain of small errors, allowing us to correctly determine the thickness and refraction index of superficial films.

Published in	American Journal of Optics and Photonics (Volume 3, Issue 4)
DOI	10.11648/j.ajop.20150304.12
Page(s)	48-53
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2015. Published by Science Publishing Group

Keywords

Ellipsometry, Superficial Film, External Specular Reflection

References

[1]	R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland publ. Comp., Amsterdam - New York - Oxford, 1977.
[2]	S. Jitian, “The ellipsometrical study of adsorption-desorption of the corrosion inhibitors on metallic surfaces”, Romanian Reports in Physics, Vol.65, No.1, pp. 204–212, 2013.
[3]	S. Jitian, E. Chifu,, “The Ellipsometric Study of Polimer Films on Metals”, Studia Univ. Babeş-Bolyai. Chemia, Vol.31, No. 2, pp.69-75, 1986.
[4]	H. Rosen, J. Shamir, “Interferometric determination of ellipsometric parameters” J. Phys. E: Sci. Instrum., Vol.11, No.9, pp.905-908, September 1978.
[5]	K.H. Chen, C.C. Hsu, D.C. Su, “A method for measuring the complex refractive index and thickness of a thin metal film”, Appl. Phys. B – Lasers and Optics, Vol.77, pp.839–842, December 2003.
[6]	Juan E. González-Ramírez, Juan Fuentes, Luis C. Hernández, and Luís Hernández,” Evaluation of the thickness in nanolayers using the Transfer Matrix method for modeling the spectral reflectivity”, Research Letters in Physics, Vol. 2009, Article ID 594175, 2009.
[7]	R. M.A. Azzam, M. Emdadur Rahman Khan, “Complex reflection coefficients for the parallel and perpendicular polarizations of a film–substrate system”, Applied Optics, Vol.22, No.2, pp.253-264, January 1983.
[8]	R. M.A. Azzam, T.F. Thonn, “Pseudo-Brewster and second-Brewster angles of an absorbing substrate coated by a transparent thin film”, Applied Optics, Vol.22, No.24, pp.4155-4166, December 1983.
[9]	R.M.A. Azzam, “Angle-of-incidence derivatives of the complex parallel and perpendicular reflection coefficients and their ratio for a film-substrate system “Opt. Acta, Vol.30, No.8, pp.1113-1124, August 1983.
[10]	F.L. McCrackin, A Fortran Program for Analysis of Ellipsometer Measurement, Natl. Bur. Std., Technical Note 479, Washington, 1969.

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Simion Jitian. (2015). The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates. American Journal of Optics and Photonics, 3(4), 48-53. https://doi.org/10.11648/j.ajop.20150304.12

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ACS Style

Simion Jitian. The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates. Am. J. Opt. Photonics 2015, 3(4), 48-53. doi: 10.11648/j.ajop.20150304.12

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AMA Style

Simion Jitian. The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates. Am J Opt Photonics. 2015;3(4):48-53. doi: 10.11648/j.ajop.20150304.12

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@article{10.11648/j.ajop.20150304.12,
  author = {Simion Jitian},
  title = {The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates},
  journal = {American Journal of Optics and Photonics},
  volume = {3},
  number = {4},
  pages = {48-53},
  doi = {10.11648/j.ajop.20150304.12},
  url = {https://doi.org/10.11648/j.ajop.20150304.12},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ajop.20150304.12},
  abstract = {The ellipsometrical analysis of the external specular reflection of light on nonabsorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical nonabsorbing superficial films the curves =f(df) and =f(df) are periodical, while the curves =f() are closed. The paper presents observations on the dependence of the ellipsometric parameters  and  on df. The analysis of the periodicity of these curves allows us to correctly determine the film thickness for thicknesses greater than dmin. The value of dmin depends on the refractive index nf of the surface film, the incidence angle φ0 and the wavelength λ of the incident radiation. The dependence of dmin on nf, φ0 and λ is analyzed. From the curve shape we can draw conclusions with respect to the domain of small errors, allowing us to correctly determine the thickness and refraction index of superficial films.},
 year = {2015}
}

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TY  - JOUR
T1  - The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates
AU  - Simion Jitian
Y1  - 2015/08/11
PY  - 2015
N1  - https://doi.org/10.11648/j.ajop.20150304.12
DO  - 10.11648/j.ajop.20150304.12
T2  - American Journal of Optics and Photonics
JF  - American Journal of Optics and Photonics
JO  - American Journal of Optics and Photonics
SP  - 48
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PB  - Science Publishing Group
SN  - 2330-8494
UR  - https://doi.org/10.11648/j.ajop.20150304.12
AB  - The ellipsometrical analysis of the external specular reflection of light on nonabsorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical nonabsorbing superficial films the curves =f(df) and =f(df) are periodical, while the curves =f() are closed. The paper presents observations on the dependence of the ellipsometric parameters  and  on df. The analysis of the periodicity of these curves allows us to correctly determine the film thickness for thicknesses greater than dmin. The value of dmin depends on the refractive index nf of the surface film, the incidence angle φ0 and the wavelength λ of the incident radiation. The dependence of dmin on nf, φ0 and λ is analyzed. From the curve shape we can draw conclusions with respect to the domain of small errors, allowing us to correctly determine the thickness and refraction index of superficial films.
VL  - 3
IS  - 4
ER  -

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Author Information

Simion Jitian

Politehnica University Timisoara, Faculty of Engineering, Hunedoara, Romania

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APA Style

Simion Jitian. (2015). The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates. American Journal of Optics and Photonics, 3(4), 48-53. https://doi.org/10.11648/j.ajop.20150304.12

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ACS Style

Simion Jitian. The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates. Am. J. Opt. Photonics 2015, 3(4), 48-53. doi: 10.11648/j.ajop.20150304.12

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AMA Style

Simion Jitian. The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates. Am J Opt Photonics. 2015;3(4):48-53. doi: 10.11648/j.ajop.20150304.12

Copy | Download

@article{10.11648/j.ajop.20150304.12,
  author = {Simion Jitian},
  title = {The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates},
  journal = {American Journal of Optics and Photonics},
  volume = {3},
  number = {4},
  pages = {48-53},
  doi = {10.11648/j.ajop.20150304.12},
  url = {https://doi.org/10.11648/j.ajop.20150304.12},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ajop.20150304.12},
  abstract = {The ellipsometrical analysis of the external specular reflection of light on nonabsorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical nonabsorbing superficial films the curves =f(df) and =f(df) are periodical, while the curves =f() are closed. The paper presents observations on the dependence of the ellipsometric parameters  and  on df. The analysis of the periodicity of these curves allows us to correctly determine the film thickness for thicknesses greater than dmin. The value of dmin depends on the refractive index nf of the surface film, the incidence angle φ0 and the wavelength λ of the incident radiation. The dependence of dmin on nf, φ0 and λ is analyzed. From the curve shape we can draw conclusions with respect to the domain of small errors, allowing us to correctly determine the thickness and refraction index of superficial films.},
 year = {2015}
}

Copy | Download

TY  - JOUR
T1  - The Ellipsometrical Analysis of External Reflection of Light on Superficial Films on Solid Substrates
AU  - Simion Jitian
Y1  - 2015/08/11
PY  - 2015
N1  - https://doi.org/10.11648/j.ajop.20150304.12
DO  - 10.11648/j.ajop.20150304.12
T2  - American Journal of Optics and Photonics
JF  - American Journal of Optics and Photonics
JO  - American Journal of Optics and Photonics
SP  - 48
EP  - 53
PB  - Science Publishing Group
SN  - 2330-8494
UR  - https://doi.org/10.11648/j.ajop.20150304.12
AB  - The ellipsometrical analysis of the external specular reflection of light on nonabsorbing superficial films allows us to know factors which influence the ellipsometric measurement of the analyzed system. For optical nonabsorbing superficial films the curves =f(df) and =f(df) are periodical, while the curves =f() are closed. The paper presents observations on the dependence of the ellipsometric parameters  and  on df. The analysis of the periodicity of these curves allows us to correctly determine the film thickness for thicknesses greater than dmin. The value of dmin depends on the refractive index nf of the surface film, the incidence angle φ0 and the wavelength λ of the incident radiation. The dependence of dmin on nf, φ0 and λ is analyzed. From the curve shape we can draw conclusions with respect to the domain of small errors, allowing us to correctly determine the thickness and refraction index of superficial films.
VL  - 3
IS  - 4
ER  -

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